Principle Investigator

Dr. Sheng Shian Li is a Professor & Principle Investigator of RFMEMS research group at INEMS, National Tsing Hua University, TAIWAN. He received the B.S. and M.S. degrees in Mechanical Engineering from National Taiwan University in 1996 and 1998, respectively. He received the M.S. and Ph.D. degrees from University of Michigan, Ann Arbor, in 2004 and 2007, respectively, both in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters. In 2008, he joined the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, where he is currently a Professor. His current research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, CMOS-MEMS technology, front-end communication architectures, and integrated circuit design and technology. Dr. Li was a recipient of the Teaching Excellence Award and Young Faculty Research Award from the College of Engineering, National Tsing Hua University, in 2011 and 2012, respectively. In 2013, Dr. Li also received the Ta-Yu Wu Memorial Award, National Science Council, Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He served as the TPC of the IEEE International Frequency Control Symposium (IFCS), IEEE Sensors Conference, and ETPC of Transducers Conference. He also served as the local organizing committee chair for the 2014 IEEE IFCS and TPC vice chair (Group 1) for the 2016 IEEE IFCS, respectively.


Research Interest



      CMOS-MEMS resonators & filters, Piezoelectric MEMS resonators & filters, SOI capacitive resonators


  • Sensors

      Thermal-piezoresistive resonantors (TPR) & thermal-piezoresistive oscillatos (TPO) for mass sensing, 3D array resosnant pressure sensors


  • Integrated Systems

      Integrated MEMS oscillators, Temperature compensated MEMS oscillator, Interface circuits for sensors

Recent News

  • Congratulations to Emily (劉廷淵) and Mike (周晉宇) for their work selected to be presented in Transducers’17 (Oral presentations)!
  • Three papers were presented in MEMS’17 by Joe (陳昭瑜), Anurag, and Andy (朱家君).
  • Congratulations to Jeff (劉峻佑) and Ming-Huang (李銘晃) for their work selected to present in IEDM’16
  • Congratulations to Jeff (劉峻佑) for winning the best paper award in 20th NanoEngineering and MicroSystems Technology Conference (第二十屆奈米工程暨微系統技術研討會)! (Click here)
  • Congratulations to Joe (陳昭瑜) for winning the 2016 CIC Outstanding Chip Design Award: Best Design (2016 CIC 晶片製作 特優設計獎)!
  • Congratulations to Gayathri for winning the 1st place of College of Engineering Paper Competition! (Click here)


Contact us

RFMEMS Lab,Institute of NanoEngineering and MicroSystems,National Tsing Hua University
Hsinchu No. 101, Sec. 2, Kuang-Fu Rd., Taiwan 30013

Office:Room 616, Engineering Building I





Recent work